The Dutch partners will combine research and advanced lithography technologies to accelerate mass production of photonic chips and strengthen Europe’s semiconductor ecosystem.
Dutch research institute TNO and semiconductor equipment giant ASML have announced a strategic partnership to advance the development and large-scale manufacturing of photonic chips, a move aimed at strengthening Europe’s semiconductor ecosystem and boosting its competitiveness in next-generation chip technologies.
The collaboration will be built around TNO’s Photonic Chip Pilot Line, a new manufacturing and research facility under construction at the High Tech Campus in Eindhoven, the Netherlands. The pilot line is designed to bridge the gap between laboratory research and commercial production by providing companies with access to advanced manufacturing infrastructure.
As part of the agreement, ASML will integrate its lithography technologies, including deep ultraviolet (DUV) and i-line scanners, into the pilot line. The companies will also work together on process control, metrology and manufacturing optimization to develop production methods capable of supporting high-volume photonic chip fabrication. The shared R&D environment will host technical workshops, process development initiatives and customer demonstrations, allowing both organizations to accelerate innovation in integrated photonics.
Once operational, the facility will support the production of indium phosphide (InP)-based photonic chips on 6-inch wafers, a significant milestone in scaling the technology for commercial use. The project complements the work of the Photonic Integration Technology Centre (PITC), a joint initiative involving TNO, Eindhoven University of Technology and the University of Twente, which focuses on transforming photonics research into market-ready products.
TNO said the partnership reinforces its ambition to foster Europe’s semiconductor innovation ecosystem by combining world-class research capabilities with advanced manufacturing equipment. ASML said the collaboration will help optimize its lithography solutions for photonic applications while shortening the transition from research to industrial-scale production. Together, the organizations aim to speed up the commercialization of integrated photonic technologies and strengthen Europe’s position in a rapidly growing global market for photonic chips.
