The Dutch semiconductor equipment maker says it has never shipped EUV systems or related components to China and remains compliant with export-control regulations.
Dutch semiconductor equipment maker ASML has denied reports suggesting that one of its advanced extreme ultraviolet (EUV) lithography machines may have reached China in violation of export restrictions.
The company said it has never shipped an EUV system to China and has also not supplied any components, modules, or equipment specifically designed for use in such machines. ASML issued the clarification after a Bloomberg News report said U.S. Commerce Secretary Howard Lutnick had raised concerns with company executives that the technology may have made its way to China despite U.S.-led export controls.
ASML rejected the allegations, stating that it has consistently adapted its operations to comply with changing export-control regulations. The company said it remains fully committed to following all applicable rules governing the sale and shipment of semiconductor manufacturing equipment.
The Dutch government also reaffirmed its strict oversight of chip-equipment exports. The Ministry of Foreign Affairs said semiconductor manufacturing tools, technologies, and related components covered under European Union dual-use regulations and national measures require export licenses, adding that the rules are enforced rigorously.
ASML’s EUV machines are considered among the most advanced tools used in semiconductor manufacturing, enabling the production of cutting-edge chips for artificial intelligence, high-performance computing, and other advanced applications. The systems are massive, weighing around 180 metric tons and measuring roughly the size of a school bus.
The dispute comes amid intensifying efforts by Washington to restrict China’s access to advanced semiconductor technologies. In April, U.S. lawmakers proposed legislation aimed at ensuring allied nations align their export-control policies with those of the United States, with ASML’s equipment specifically mentioned in the proposal.
The issue also highlights China’s efforts to develop domestic alternatives. Reuters reported last year that Chinese researchers had built a prototype EUV machine with the help of former ASML engineers, underscoring Beijing’s push to reduce reliance on foreign chipmaking technology.
